APC valve
EtherCAT communication
- – FOE(File access Over EtherCAT) between master and slave
- – Direct firmware update by EtherCAT
Pressure control over wide range
- – Accurate pressure control by multiple pressure gauge(10 / 100 / 1000 torr)
- – Possible to hold and control valve position
Fast close & slow exhaust control
Internal & external heater
- – Low power consumption, heat jacket with anti-flame materials
- – Simple structured “one-body” heating jacket with anti-flame materials
HW design
- – Large conductance for next generation process
- – High-speed operation & high durability
