• – FOE(File access Over EtherCAT) between master and slave
• – Direct firmware update by EtherCAT

Pressure control over wide range

• – Accurate pressure control by multiple pressure gauge(10 / 100 / 1000 torr)
• – Possible to hold and control valve position

Fast close & slow exhaust control

Internal & external heater

• – Low power consumption, heat jacket with anti-flame materials
• – Simple structured “one-body” heating jacket with anti-flame materials

HW design

• – Large conductance for next generation process
• – High-speed operation & high durability

• The valve body and controller are manufactured in one piece, and two pressure sensors with different pressure sensing ranges are connected, and the optimal pressure sensor is automatically selected according to the controlled pressure range.

Non-geared direct motor drive

• Through FEM analysis and 3D design, developed a throttle valve with a non-geared direct motor drive structure that can quickly and precisely control the operation of the butterfly valve without backlash by gears.

Adaptive mode operation by learning

• Through the learning process, the PID value appropriate for the process condition is automatically set to enable precise pressure control. In addition, the user can tune the PID value to perform precise pressure control.

[Video]

[Video]

Digital Input/Output 8ch (24V)

7-Segment

• – Counting Number, Error Code Display

Node ID Switch 2EA

Communication : EtherCAT

※ Connector Part Number

• – I/O Connector – Molex 35312-10
• – Sensor Connector – Molex 35312-5
• – Power Connector

Two EZI-Servo Pulse-E products can be connected (18 inputs, outputs)

LED ON, OFF depending on the operation status of each input and output signal (Refer to the input/output circuit in the EZI-Servo Plus-E product manual)

NPN Input rated voltage 5mA (+-10%)

NPN Output rated voltage driving current 15mA or less

Current consumption

• - Maximum current consumption is 1.25A with Fastec EZI-Servo Plus-E 2EA.
• - Maximum current consumption is 0.25A without Pastex EZI-Servo Plus-E 2EA.

※ Caution: Input and Output operate as NPN type signals.