Certification
Year | Month | Detail |
2013 | 5 | Attained Certification as a Venture company 20200102364 – 2020 Recertification |
2014 | 2 | Patent : Apparatus for Aligning plate 10-1363083 |
5 | CE : Throttle [D1 14 05 87084 002] | |
12 | Certification of design registration : Butterfly valve [30-0776508] | |
2015 | 7 | CE : Throttle valve [D1 15 07 87084 001] |
Patent : Throttle valve [10-1538109] | ||
11 | Certification of related design registration : Butterfly valve [30-0825648] | |
2016 | 8 | Patent : Throttle valve [10-1646667] |
2018 | 3 | CE : Throttle valve [D1 18 03 87084 004] |
2019 | 3 | Patent : Throttle valve [10-1963856] |
5 | EtherCAT Conformance Test Certification : Throttle valve | |
9 | Patent : Pressure control valve of Gas chamber for Semiconductor manufacturing process with Power Switch.[10-2025838] | |
2020 | 6 | Certify “Material & Component & Equipment Professional Enterprise” |
11 | Patent : Stocker Foup control board error detection method & device using EtherCAT [10-2180626] | |
2021 | 1 | CE : Tray counter module [D1 08784 0005 REV.00] |
11 | CE : Exhaust valve controller [E8A 08784 0006 REV.00] | |
CE : APC Valve [E8A 087084 0007] | ||
12 | [National representative of innovative companies 1000] Selection of the 2nd company | |
2022 | 1 | Patent : Vacuum Chimber Pressure Control Valve Device [10-2022-0005852] |
Patent : Proportional pressure control valve control reference value setting method in pressure control system and pressure control system using it [10-2022-0010297] | ||
Patent Application: Chamber pressure control method of pressure control system that applies different reference values according to chamber pressure and pressure control system for it [10-2022-0011396] | ||
7 | Certification of Corporate Research Institute | |
11 | APC EtherCAT Conformance Test Certification | |
2023 | 3 | ISO 9001 : 2015 [KQ 233209] |
ISO 45001 : 2018 [KS 23361] | ||
ISO 14001 : 2015 [KE231959] | ||
4 | Patent Application : Vacuum pressure control valve with by-product removal function [10-2023-0051147] | |
6 | Production performance evaluation certification [Vacuum pressure control valve for semiconductor ALD equipment] |
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9 | SSQ Certification | |
11 | Patent : Valve device for controlling the internal pressure of a vacuum chamber [10-2065998] | |
2024 | 2 | Patent : Proportional pressure control valve control in the pressure control system [10-2644149] |
Certification
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Patent Certification
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Company-affiliated research certificate
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Related design registration certificate
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Design registration certificate
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Venture business confirmation
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Confirmation of specialized company f...
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification
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Patent Certification