Company

Certification

Year Month Detail
2013 5 Attained Certification as a Venture company 20200102364 – 2020 Recertification
2014 2 Patent : Apparatus for Aligning plate 10-1363083
5 CE : Throttle [D1 14 05 87084 002]
12 Certification of design registration : Butterfly valve [30-0776508]
2015 7 CE : Throttle valve [D1 15 07 87084 001]
Patent : Throttle valve [10-1538109]
11 Certification of related design registration : Butterfly valve [30-0825648]
2016 8 Patent : Throttle valve [10-1646667]
2018 3 CE : Throttle valve [D1 18 03 87084 004]
2019 3 Patent : Throttle valve [10-1963856]
5 EtherCAT Conformance Test Certification : Throttle valve
9 Patent : Pressure control valve of Gas chamber for Semiconductor manufacturing process with Power Switch.[10-2025838]
2020 6 Certify “Material & Component & Equipment Professional Enterprise”
11 Patent : Stocker Foup control board error detection method & device using EtherCAT [10-2180626]
2021 1 CE : Tray counter module [D1 08784 0005 REV.00]
11 CE : Exhaust valve controller [E8A 08784 0006 REV.00]
CE : APC Valve [E8A 087084 0007]
12 [National representative of innovative companies 1000] Selection of the 2nd company
2022 1 Patent : Vacuum Chimber Pressure Control Valve Device [10-2022-0005852]
Patent : Proportional pressure control valve control reference value setting method in pressure control system and pressure control system using it [10-2022-0010297]
Patent Application: Chamber pressure control method of pressure control system that applies different reference values according to chamber pressure and pressure control system for it [10-2022-0011396]
7 Certification of Corporate Research Institute
11 APC EtherCAT Conformance Test Certification
2023 3 ISO 9001 : 2015 [KQ 233209]
ISO 45001 : 2018 [KS 23361]
ISO 14001 : 2015 [KE231959]
4 Patent Application : Vacuum pressure control valve with by-product removal function [10-2023-0051147]
6 Production performance evaluation certification
[Vacuum pressure control valve for semiconductor ALD equipment]
9 SSQ Certification
11 Patent : Valve device for controlling the internal pressure of a vacuum chamber [10-2065998]
2024 2 Patent : Proportional pressure control valve control in the pressure control system [10-2644149]

Certification

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    Company-affiliated research certificate
  • 관련디자인등록증.png
    Related design registration certificate
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    Design registration certificate
  • 벤처기업확인서.png
    Venture business confirmation
  • 소재부품장비전문기업확인ㅅ.png
    Confirmation of specialized company f...
  • 인증서.png
    Certification
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    Certification
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    Certification
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    Certification
  • 인증서5.png
    Certification
  • 인증서6.png
    Certification
  • 인증서7.png
    Certification
  • 인증서8.png
    Certification
  • 특허증.png
    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification
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    Patent Certification