APC valve
- Pressure control over wide range
- – Accurate pressure control by multiple pressure gauge(10 / 100 / 1000 torr)
- – Possible to hold and control valve position
- Fast close & slow exhaust control
- Internal & external heater
- – Low power consumption for energy saving
- – Simple structured “one-body” heating jacket with anti-flame materials
- EtherCAT communication
- – FoE(File access Over EtherCAT) between master and slave
- – Direct firmware update by EtherCAT
- HW design
- – Large conductance for next generation process
- – High-speed operation & high durability
- Specifications
| Description | Specifications |
| Working Pressure Range | 1.3 X 10-6 ~ 1.0 X 105 Pa |
| External Leakage | 1.3 x 10-9 Pa m3/sec (1.0 x 10-8 Torr l/sec) |
| Number of Pressure Sensors | 3ea |
| Valve Port Dimension | ISO 100 (Standard) |
| Control Stroke | 40 mm |
| Heater Power (Internal + External) | 460 W |
| Fast Response (Open + Close) | < 1 sec |
| Weight | 26 kg |
| Input Power | 24VDC 3A, ±15VDC 3A |
| Pressure Input Signal | 0~10VDC (standard) 0~5VDC (optional) |
| Ambient Operating Temperature | 5 ~ 45℃ |
| Control Method | PIDA (set point : 10ea) |
| Communication Protocol | EtherCAT (Standard) |
| Compliance | CE |
- Dimension
| Parts | A | B | C | D | E | F | H | J | K | L |
| ISO 100(S) | 6.14 (156) |
10.67 (271) |
6.61 (168) |
6.46 (164) |
Ø185 | 1.97 (50) |
9.33 (237) |
8.11 (206) |
19.41 (493) |
8.39 (213) |
Unit: Inches (mm)
- Ordering Code (Part Number)
| Parts | 100S | E |
| Model | Flange | Communication |
| UAV : APC Valve UAC : APC Valve Controller |
100S: ISO 100 | E: EtherCAT |